연구개발 제품 MEMS

Film Piezo single crystal(FPSC) MEMS Applications

IBULE PHOTONICS, Inc. has process that can bond PMN-PT Single Crystal on silicone wafer and process it into thickness appropriate to application. Application is possible in products such as MEMS acoustic sensor or P-MUT (Piezoelectric micromachined ultrasonic transducers).

• FPSC MEMS resonator

  - 0.8~1.5GHz resonance using [001] single crystal
  - Wine-Glass mode resonators using [011] single crystal
  - Wideband resonator

  

• FPSC MEMS deformable mirror

  - Single crystal PMN-PT block bonded on an SOI wafer (thickness 30um)
  - 19 annular ring type actuators
  - 17 mm diameter membrane
  - Large stroke over 10 um at 20 V for each actuator
  - High operating bandwidth up to 874 Hz

  ( Ref. Journal of Microelectromechanical Systems, Volume: 20 , Issue: 6 , Dec. 2011 )

  

  • Actuator side
  • Mirror side

• FPSC MEMS accelerometer

  - More controlled temperature dependence
  - No need for a stable driving source
  - Better long term stability
  - Higher possible band width

  

  	PZT	PMN-PT
  Voltage sensitivity (mV/g)	0.31	0.75
  Charge sensitivity (pC/g)	0.026	0.4
  Resonance Freq. (kHz)	11	10
  Size (mm)	10x10	10x11

• FPSC Energy Harvest : Nano-generator

  - Flexible Single Crystalline PMN-PT Piezoelectric Energy Harvester
  - Bending : Generation of high current signal of up to 0.223 mA and output voltage of 8.2 V

  

  Items	Specification
  PMN-PT	Thickness : 8um
  Mother substrate	Silicon wafer
  Stressor	Ni film (Thickness : 20um)
  Plastic substrate	Polyethylene terephthalate(PET)