iBULe Photonics

박막 연구개발 제품
MEMS Lidar

SC MEMS had successfully developed the Lidar sensor using Piezo Single Crystal PMN-PT actuator, and fabrication processing sizes up to 8 inch diameter.

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Resonance Frequency [kHz]	30° Drive Voltage [Vpp]
3.5	5.5

Resonance Frequency [kHz]

30° Drive Voltage [Vpp]

3.5

5.5

PMN-PT

Parameter	Units	[001] poled		[011] poled
Parameter	Units	Low-PT	High-PT	Low-PT	High-PT
$ϵ_{33} T / ϵ_{0}$	-	4842	7000	3760	5770
$d_{i j}$	${x10}^{-12} C / N$	$d_{33} = 1282$	$d_{33} = 1620$	$d_{33} = -1140$	$d_{33} = -1820$
$S_{i j}^{E}$	${x10}^{-12} m^{2} / N$	$S_{33}^{E} = 47$	$S_{33}^{E} = 56$	$S_{33}^{E} = 53$	$S_{33}^{E} = 78$
Trt	${}^{0}C$	95	85	95	85
Ec	KV/cm	2	2.5	2	2.5
Density	$k g / m^{3}$	8080

PIN-PMN-PT

Parameter	Units	[001] poled		[011] poled
Parameter	Units	Low-PT	High-PT	Low-PT	High-PT
$ϵ_{33} T / ϵ_{0}$	-	4457	5666	3449	4656
$d_{i j}$	${x10}^{-12} C / N$	$d_{33} = 1226$	$d_{33} = 1840$	$d_{33} = -1323$	$d_{33} = -1870$
$S_{i j}^{E}$	${x10}^{-12} m^{2} / N$	$S_{33}^{E} = 49$	$S_{33}^{E} = 79$	$S_{33}^{E} = 72$	$S_{33}^{E} = 99$
Trt	${}^{0}C$	120	90	120	90
Ec	KV/cm	4	6	4	6
Density	$k g / m^{3}$	8154

PRODUCTS
박막 연구개발 제품 MEMS Lidar

박막 연구개발 제품
MEMS Lidar

Single Crystal Properties

PRODUCTS 박막 연구개발 제품 MEMS Lidar

박막 연구개발 제품 MEMS Lidar

Single Crystal Properties

PRODUCTS
박막 연구개발 제품 MEMS Lidar

박막 연구개발 제품
MEMS Lidar